Reconstruction of a focused e-beam profile in amorphous carbon using diffusion of n-alcane molecules along carbon nanopillar sidewalls

G.S. Zhdanov; M.S. Lozhkin

doi:10.62721/diffusion-fundamentals.30.1014

Reconstruction of a focused e-beam profile in amorphous carbon using diffusion of n-alcane molecules along carbon nanopillar sidewalls

Authors

G.S. Zhdanov
M.S. Lozhkin

DOI:

https://doi.org/10.62721/diffusion-fundamentals.30.1014

Keywords:

ebid, carbon

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Published

2017-12-01

How to Cite

[1]

G. Zhdanov and M. Lozhkin, “Reconstruction of a focused e-beam profile in amorphous carbon using diffusion of n-alcane molecules along carbon nanopillar sidewalls”, diffus. fundam., vol. 30, Dec. 2017, doi: 10.62721/diffusion-fundamentals.30.1014.

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Issue

Vol. 30 (2017): Special Issue "Diffusion Fundamentals VII"

Section

Extended Abstracts

URN

http://nbn-resolving.org/urn:nbn:de:bsz:15-qucosa2-316539

License

This work is licensed under a Creative Commons Attribution 4.0 International License.